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High-temperature vacuum heat treatment of components used in vacuum devices and semiconductor manufacturing equipment.

High-temperature treatment of components used in vacuum devices and semiconductor manufacturing equipment is performed in a vacuum. This contributes to process startup and reduces processing time.

In a clean room, a vacuum chamber is used for degassing graphite, ceramics, metal parts, and more. It can remove not only gases adhered to the surface but also moisture that has penetrated internally. 【Applications】 ■ Degassing of vacuum equipment, semiconductor manufacturing parts, etc. ■ Degassing of graphite, ceramics, etc. ■ Baking after parts cleaning *For more details, please refer to the catalog. Feel free to contact us with any inquiries.

  • Processing Contract

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